{"id":2367,"date":"2023-09-08T09:26:46","date_gmt":"2023-09-08T00:26:46","guid":{"rendered":"http:\/\/magn.pe.titech.ac.jp\/lab\/?p=2367"},"modified":"2023-09-08T10:38:31","modified_gmt":"2023-09-08T01:38:31","slug":"jst-a-step%e8%82%b2%e6%88%90%e5%9e%8b%ef%bc%89%e6%8e%a1%e6%8a%9e","status":"publish","type":"post","link":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/2367\/","title":{"rendered":"JST A-Step(\u80b2\u6210\u578b\uff09\u306e\u63d0\u6848\u304c\u63a1\u629e\u3055\u308c\u305f"},"content":{"rendered":"<p><a href=\"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-content\/uploads\/2016\/05\/news_a.gif\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-833\" src=\"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-content\/uploads\/2016\/05\/news_a.gif\" alt=\"\" width=\"48\" height=\"24\" \/><\/a>\u79c1\u305f\u3061\u306e\u63d0\u6848\u3067\u3042\u308b\u300c\uff13\u6b21\u5143\u78c1\u6027\u7d30\u7dda\u30e1\u30e2\u30ea\u300d\u306fJST-A Step(\u80b2\u6210\u578b\uff09\u306b<a href=\"https:\/\/www.jst.go.jp\/pr\/info\/info1636\/pdf\/info1636.pdf\" target=\"_blank\" rel=\"noopener\">\u63a1\u629e\u3055\u308c\u307e\u3057\u305f<\/a>\u3002<\/p>\n<p>JST A-Step(\u80b2\u6210\u578b\uff09\u3068\u306f\u3001\u5927\u5b66\u3084\u516c\u7684\u7814\u7a76\u6a5f\u95a2\u306a\u3069\u306b\u304a\u3051\u308b\u65b0\u898f\u6027\u30fb\u512a\u4f4d\u6027\u306e\u3042\u308b\u57fa\u790e\u7814\u7a76\u6210\u679c\uff08\u6280\u8853\u30b7\u30fc\u30ba\uff09\u306b\u3064\u3044\u3066\u300c\u5b66\u300d\u3068\u300c\u7523\u300d\u306e\u30de\u30c3\u30c1\u30f3\u30b0\u3092\u884c\u3044\u3001\u4f01\u696d\u3068\u306e\u5171\u540c\u7814\u7a76\u306b\u3064\u306a\u3052\u308b\u307e\u3067\u78e8\u304d\u4e0a\u3052\u3001\u5171\u540c\u7814\u7a76\u4f53\u5236\u306e\u69cb\u7bc9\u3092\u76ee\u6307\u3059\u3082\u306e\u3067\u3059\u3002<\/p>\n<p>3\u6b21\u5143\u78c1\u6027\u7d30\u7dda\u30e1\u30e2\u30ea\u306f\u3001\u96a3\u3042\u3046\u78c1\u533a\u9593\u306e\u78c1\u58c1\u3092\u79fb\u52d5\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u78c1\u533a\uff08\u30d3\u30c3\u30c8\uff09\u3092\u7a7a\u9593\u7684\u306b\u79fb\u52d5\u3055\u305b\u3001\u4e00\u3064\u306e\u30ea\u30fc\u30c0\u30fc\u3068\u30e9\u30a4\u30bf\u30fc\u7d20\u5b50\u3067\uff11\uff10\uff10\uff5e\uff11\uff10\uff10\uff10\u30d3\u30c3\u30c8\u3092\u8aad\u307f\u51fa\u3057\u3068\u66f8\u304d\u8fbc\u307f\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u73fe\u5728\u666e\u53ca\u3057\u3066\u3044\u308b\uff13\u6b21\u5143NAND\u30d5\u30e9\u30c3\u30b7\u30e5\u30e1\u30e2\u30ea\u3092\u51cc\u99d5\u3059\u308b\u6b21\u4e16\u4ee3\u30e1\u30e2\u30ea\u3067\u3042\u308b\u3002\u672c\u63d0\u6848\u306fPham\u7814\u7a76\u5ba4\u304c\u72ec\u81ea\u306b\u63d0\u6848\u3057\u3001\u7279\u8a31\u51fa\u9858\u3057\u305f\uff13\u6b21\u5143\u78c1\u6027\u7d30\u7dda\u30e1\u30e2\u30ea\u306e\u69cb\u9020\u3068\u8981\u7d20\u6280\u8853\u3001\u5177\u4f53\u7684\u306b\u306f\u3001(1)ALD\/CVD\u306b\u3088\u308b\u7e26\u7a74\u306b3\u6b21\u5143\u78c1\u6027\u7d30\u7dda\u30e1\u30e2\u30ea\u306e\u6210\u819c\u6280\u8853\u3001(2)\u78c1\u6027\u7d30\u7dda\u306e\u51f8\u51f9\u306a\u3069\u3001\u7279\u6b8a\u306a\u5f62\u72b6\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u72ec\u81ea\u306a\u30d3\u30c3\u30c8\u30b7\u30d5\u30c8\u30a8\u30e9\u30fc\u6291\u5236\u6280\u8853\u3001(3)\u30b9\u30d4\u30f3\u8ecc\u9053\u30c8\u30eb\u30af\u306b\u3088\u308b\u8d85\u9ad8\u901f\u78c1\u58c1\u99c6\u52d5\u6280\u8853\u304b\u3089\u306a\u308b\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u79c1\u305f\u3061\u306e\u63d0\u6848\u3067\u3042\u308b\u300c\uff13\u6b21\u5143\u78c1\u6027\u7d30\u7dda\u30e1\u30e2\u30ea\u300d\u306fJST-A Step(\u80b2\u6210\u578b\uff09\u306b\u63a1\u629e\u3055\u308c\u307e\u3057\u305f\u3002 JST A-Step(\u80b2\u6210\u578b\uff09\u3068\u306f\u3001\u5927\u5b66\u3084\u516c\u7684\u7814\u7a76\u6a5f\u95a2\u306a\u3069\u306b\u304a\u3051\u308b\u65b0\u898f\u6027\u30fb\u512a\u4f4d\u6027\u306e\u3042\u308b\u57fa\u790e\u7814\u7a76\u6210\u679c\uff08\u6280\u8853\u30b7\u30fc\u30ba\uff09\u306b\u3064\u3044\u3066\u300c\u5b66\u300d &hellip; <a href=\"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/2367\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_exactmetrics_skip_tracking":false,"_exactmetrics_sitenote_active":false,"_exactmetrics_sitenote_note":"","_exactmetrics_sitenote_category":0,"footnotes":""},"categories":[12],"tags":[],"class_list":["post-2367","post","type-post","status-publish","format-standard","hentry","category-event"],"_links":{"self":[{"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/posts\/2367","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/comments?post=2367"}],"version-history":[{"count":7,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/posts\/2367\/revisions"}],"predecessor-version":[{"id":2374,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/posts\/2367\/revisions\/2374"}],"wp:attachment":[{"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/media?parent=2367"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/categories?post=2367"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/magn.ee.eng.isct.ac.jp\/lab\/wp-json\/wp\/v2\/tags?post=2367"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}